Introduction to Backscattered Electron Diffraction (EBSD)

Abstract

In this article, an introduction to the efficient and developing method (EBSD (Electron Backscattered Diffraction)
it is possible. Backscattered Electron Diffraction (EBSD) has significant capabilities in the quantitative and qualitative investigation of microstructure.
has it. The development of EBSD has recently received wide attention from industries and research centers, so that the main method of investigation
The microstructure has changed in many of these centers. This method is used to calculate crystal directions of microstructures (and Nano
Microstructures, (phase identification and the degree of distribution of phases are used. The first evidence of EBSD in 1928 in the microscope
Transmission electron microscopy (TEM) was observed and until today, great progress has been made in image improvement and data extraction.
From
It can be mentioned the development of hardware, the preparation of software, the invention of image observation methods and the quantification of microstructure.
The principles, history, applications and several practical examples of EBSD are presented in this article.

Keywords

• Backscattered Electron Diffraction (EBSD
• quantitative investigation of microstructure
• directional imaging (OIM) directional difference

20.1001.1.22285946.1392.4.11.5.0

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